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Fixed-charge examination by surface energy measurement
Mojrová, Barbora ; Boušek, Jaroslav (referee) ; Hégr, Ondřej (advisor)
This work is deal with development of alternative method measuring fixed charge in thin dielectric layers by surface tension. Presence fixed charge takes effect so-called Back Surface Field (BFS), which helps to decrease surface recombination velocity on back side of solar cell. In work is described experimental measuring on dielectric layers Al2O3, AlN, SiNx, Y2O3 and PSG deposit on crystalline silicon wafers. Surface tension (it is the same like surface free energy) is analyzed from contact angle size using See System.
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Diagnostics of passivation layers for crystalline silicon solar cellls.
Sládek, Karel ; Hégr, Ondřej (referee) ; Boušek, Jaroslav (advisor)
The work deals with a comparison of existing and perspective types of passivation and anti-reflective coating for silicon solar cells. The theoretical part describes the appropriate methodology for the characterization of these layers and focuses on the passivation layers based on Al2O3. The practical part describes design and verification operations of the equipment for measuring of the amount of fixed charge in the passivation layers using corona discharge. It also describes the implementation of equipment and the results of indicative tests for positive and negative polarity of high voltage. The final part discusses the possibility of equipment improving.
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Fixed-charge examination by surface energy measurement
Mojrová, Barbora ; Boušek, Jaroslav (referee) ; Hégr, Ondřej (advisor)
This work is deal with development of alternative method measuring fixed charge in thin dielectric layers by surface tension. Presence fixed charge takes effect so-called Back Surface Field (BFS), which helps to decrease surface recombination velocity on back side of solar cell. In work is described experimental measuring on dielectric layers Al2O3, AlN, SiNx, Y2O3 and PSG deposit on crystalline silicon wafers. Surface tension (it is the same like surface free energy) is analyzed from contact angle size using See System.
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Characterization of Nanostructures Deposited by High-Frequency Magnetron sputtering
Hégr, Ondřej ; Boušek, Jaroslav (advisor)
This thesis deals with the analysis of nano-structured layers deposited by high-frequency magnetron sputtering on the monocrystalline silicon surface. The content of the work focuses on the magnetron sputtering application as an alternative method for passivation and antireflection layers deposition of silicon solar cells. The procedure of pre-deposite silicon surface cleaning by plasma etching in the Ar/H2 gas mixture atmosphere is suggested. In the next step the silicon nitride and aluminum nitride layers with hydrogen content in Ar/N2/H2 gas mixture by magnetron sputtering are deposited. One part of the thesis describes an experimental pseudo-carbide films deposition from a silicon target in the atmosphere of acetylene (C2H2). An emphasis is placed on the research of sputtered layers properties and on the conditions on the silicon-layer interface with the help of the standard as well as special measurement methods. Sputtered layers structure is analyzed by modern X-ray spectroscopy (XPS) and by Fourier infrared spectroscopy (FTIR). Optical ellipsometry and spectrophotometry is used for the diagnostic of the layers optical properties depending upon the wavelength of incident light. A special method of determining the surface lay-out of the charge´s carrier life in the volume and on the surface of silicon is employed to investigate the passivating effects of the sputtered layers.
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Diagnostics of passivation layers for crystalline silicon solar cellls.
Sládek, Karel ; Hégr, Ondřej (referee) ; Boušek, Jaroslav (advisor)
The work deals with a comparison of existing and perspective types of passivation and anti-reflective coating for silicon solar cells. The theoretical part describes the appropriate methodology for the characterization of these layers and focuses on the passivation layers based on Al2O3. The practical part describes design and verification operations of the equipment for measuring of the amount of fixed charge in the passivation layers using corona discharge. It also describes the implementation of equipment and the results of indicative tests for positive and negative polarity of high voltage. The final part discusses the possibility of equipment improving.
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